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| Pre-Sales technical consultation |
| provide professional, total solution for products and services, help customer choose the best suitable products.
a) Requirement analysis
b) Technology Selection
c) Suggestions for device installation
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| Installation and adjustment |
We have official authenticated engineer to do the systems installation, adjustment and acceptance, this will help customer to make the device work as fast as possible.
a) SPECTOR installation and acceptance
b) Ion source installation and adjustment
c) MKS products installation and adjustment
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We can provide a total service plan to make the devices work in best status.
a) Inspection on peripheral devices
b) Hardware setup check.
c) Tune the neutralizer and marching network.
d) Calibrate the ion source, target, fixture, GFC, OMS, etc.
e) Troubleshooting and localize the damage module, provide solution to fix it.
f) Material process tuning instruction
g) Measure and calibrate the deposition/etching rate
h) Uniformity adjustment
i) Other technical problem solution.
j) Training: base on customer's requirement, mainly focus on maintenance, cleaning,
proper use of hardware and software etc.
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