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Sputtering targets and materials 溅射材料和靶材
Your Complete Sputtering Targets and Materials Source
Sputtering Targets and Materials
In addition to a complete line of magnetrons and custom development services, Angstrom Sciences also offers a comprehensive selection of high-purity vacuum-deposition materials.
These are available in either prefabricated sputtering targets or bulk-form evaporation materials - and we manufacture wire, rods, electron-beam evaporation cones, and hearth liners, as well.
Using a variety of specialized processes (including hot pressing, vacuum sintering, hot/cold isostatic pressing, and vacuum melting), we can provide the kind of homogenous, fine-grained, high-density materials that conform to the strictest quality control.
The result is technically superior materials for all your thin film applications.
Backing Plates And Bonding
To complete your sputtering requirements, Angstrom Sciences offers both backing plates and bonding services. We can manufacture a full range of sputtering target backing plates to either original equipment specifications or custom cathode dimensions.
And we can apply specialized bonding techniques (such as high-temperature metallic or conductive-epoxy) to either our own sputtering targets and backing plates or those you supply.
All materials are specially cleaned, inspected, chemically tested, and packed under inert gas for immediate use in your vacuum system upon arrival at your facility. X-ray and ultrasound verification are available upon request.
Material Symbol
Aluminum Al
Aluminum Copper AlCu
Aluminum Nitride AlN
Aluminum Oxide Al 2 O 3
Aluminum Silicon AlSi
Antimony Sb
Barium Oxide BaO
Beryllium Be
Bismuth Bi
Boron B
Boron Carbide B 4 C
Boron Nitride BN
Cadmium Oxide CdO
Cadmium Sulfide CdS
Cadmium Telluride CdTe
Carbon C
Cerium Oxide CeO 2
Chromium Cr
Chromium Oxide Cr 2 O 3
Chromium Silicide Cr 2 Si 3
Cobalt Co
Cobalt Chromium CoCr
Copper Cu
Copper Oxide CuO
Erbium Er
Gallium Ga
Gallium Arsenide GaAs
Germanium Ge
Gold Au
Hafnium Hf
Hafnium Carbide HfC
Indium In
Indium Oxide In 2 O 3
Iron Fe
Iron Oxide Fe 2 O 3
Lead Pb
Lithium Niobate LiNbO 3
Magnesium Mg
Magnesium Oxide MgO
Magnesium Fluoride MgF 2
Manganese Mn
Molybdenum Mo
Molybdenum Silicide MoSi 2
Neodymium Nd
Material Symbol
Nickel Ni
Nickel Chromium NiCr
Nickel Cobalt NiCo
Nickel Vanadium NiV
Niobium Nb
Palladium Pd
Platinum Pt
Rhenium Re
Samarium Cobalt SmCo 5
Scandium Sc
Scandium Oxide Sc 2 O 3
Selenium Se
Silicon Si
Silicon Carbide SiC
Silicon Dioxide SiO 2
Silicon Monoxide SiO
Silicon Nitride Si 3 N 4
Silver Ag
Strontium Titanate SrTiO 3
Tantalum Ta
Tantalum Silicide TaSi 2
Tantalum Sulfide TaS 2
Tellurium Te
Terbium Tb
Terbium Iron TbFe
Thorium Oxide ThO 2
Tin Sn
Tin Oxide SnO 2
Titanium Ti
Titanium Carbide TiC
Titanium Nitride TiN
Titanium Oxide TiO
Titanium Silicide TiSi 2
Titanium Sulfide TiS 2
Tungsten W
Tungsten Silicide WSi 2
Tungsten Sulfide WS 2
Vanadium V
Yttrium Y
Yttrium Oxide Y 2 O 3
Zinc Zn
Zinc Oxide ZnO
Zirconium Zr
Zirconium Nitride ZrN
Angstrom Sciences also refines precious metals, and supplies many custom compounds and materials (such as Indium-Tin Oxide) and superconductor research materials (such as YBCO) which are not listed above. We offer purities ranging from commercial (99.5%) to ultra high (99.9999%).

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