Sunnet Systems caries the full line of Veeco spare parts for the SPECTOR and HDG system products. This list contains the spare parts most frequently requested. Please select any of the following system related spare parts you require, and Sunnet Systems will contact you with pricing and availability:

Spare Parts Request For Quotation:

0512-000-003, 12 cm & 16 cm RF Coil Insulators
0712-6, KIT,RF TOOL,4 GRID MO
410872, 12 cm Discharge Chamber Clamp Ring
410915, Alumina Discharge Chamber, RFN
410936, Alumina Backplate, RFN
410940, Gas Isolator Assembly, RFN
412200, 16 cm Discharge Chamber Clamp Ring
412279, Gas Isolator Assembly
412925, Neutralizer, Body Assembly
413115, 12 cm Accelerator Lead Assembly
413116, 12 cm Screen Lead Assembly
413187, GASKET,CU,FOR 16.50 MS FLG
413715, 16 cm Gas Isolator Assembly
414490, KIT,FUSE,RF2001
414509, RFN Matching Network Assembly
415072, HEATER,QTZ TUBE,1200W
415319, 12cm Planetary Replacement Grid Set
415715, 12 cm Quartz Discharge Chamber
415716, 16 cm Quartz Discharge Chamber
416317, KIT,SPARE PARTS,RFN
418019, KIT,GFC U SPARE PART KIT
418294, OR,VITON,167.25 CUT LENGTH.275DI
418344, KIT,FUSE,RIB2
418345, KIT,FUSE,ITAVS
420406, 4PF8400,SHIELD ASSY
420816, Planetary Fixture
420867, SHIELD,12RF,CAM300
421138, SHIELD,WELD,16RF,CAM300
421309, KIT,SPARE PARTS,4PF8400,CAM300
421455, HSF Shroud Assembly
421506, HEATER,WINDOW,QUARTZ
421659, SPRING,PLUNGER, 5/8-11, 7.0 TO 5
422495, SHADOW MASK ASSY, ADJ, CAM
423078, Grid Mt Assembly, 16 cm, 3 grid, Moly
423101, High Speed Fixture
423232, Grid Mt Assembly, 12 cm, 3 grid, Moly, HSF
423251, LINER ASSY,CAM300, DP2
423352, SHIELD,12RF,#2,WDM3
423368, KIT,FUSE,PDB2,SPARE PART,UL489,U
423506, Flip Fixture
423606, 14in. Dia Target Backing Plate
423709, 16 cm Accelerator Lead Assembly
423710, 16 cm Screen Lead Assembly
424025, HSF Test Fixture Assy
424347, KIT,SPECTOR GRID SPARE PARTS