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The SPECTOR dual ion beam deposition system is the premier thin film deposition platform available today. SPECTOR is used in a wide variety of applications across several industries including, Telecommunications, Precision Optics and Compound Semiconductors.
The SPECTOR system offers the customer full unattended tool operation through the SOURCERER control system and a wide range of hardware configuration options. You can select from several substrate fixtures to meet your research or production needs, including:
- Planetary
- Single Rotation
- In-situ Flip
In addition, SPECTOR offers the choice of three and four material water-cooled target assemblies offering a range of material deposition capabilities and in the case of the four-target assembly material scanning for graded index films.
Any of these options can be installed in the field to allow your system throughput and capabilities to change with your business and technology needs. |
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Sourcerer Ion Beam System Manager
Sourcerer is the premier deposition system controller available today. Providing an intuitive touch-screen user interface, system control is literaly at your finger tips. Sourcerer supports automated and manual system operation, including wide area network connectivity. Sourcerer provides a comprehensive data analysis package supporting cross process analysis and performance tuning. |
Options and Accessories |
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Planetary Fixture
For volume production, the planetary fixture offers the maximum coating area per run. With its automated variable deposition geometry capability, the SPECTOR planetary fixture provides excellent material uniformity without the need for shadow masking systems. |
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Single Rotation High Speed Fixture
The most flexible and accurate fixture available. The high speed fixture supports monolithic large DWDM type substrates at very high rotational rates for maximum uniformity. The fixture can also be fitted with substrate fixtures up to 12 inches in diameter supporting many smaller substrates. This fixture is an excellent choice for the most demanding applications, R&D or for small lot-size production runs. |
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In-Situ Flip Fixture
A single rotation fixture with six substrate paddles, the flip fixture allows you to perform two separate processes without breaking vacuum. This capability is especially useful for laser facet coatings. The flip fixture can also provide increase throughput for any product with relatively short deposition cycles, by eliminating a pump-down and vent cycle. |
Quartz Crystal Monitor |
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Laser optical Monitor
A tunable laser based optical deposition monitor and control package. The laser OMS is fully automated and user friendly. Supporting both quarterwave and non-quarterwave film designs, the laser OMS enables extremely complex optical films including: DWDM, CWDM, GFF, AR/HR, edge filters and more. |
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Broadband optical Monitor
For maximum product flexibility, the broadband optical monitor and control package supports film designs from 400nm - 2000nm. The system is self referencing and performs a direct product measurement. Supporting both quarterwave and non-quarterwave film designs, the broadband OMS offers maximum product flexibility. Like the Laser OMS, this system is also fully automated and user friendly. |